申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:EP0559204A1
公开(公告)日:1993-09-08
A positive type resist composition comprising an alkali-soluble resin and a quinonediazide compound, wherein the alkali-soluble resin containing resin (A) is obtainable through a condensation reaction with at least one phenol compound represented by the following general formula (I):
wherein R₁ to R₃ independently of one another each represent a hydrogen atom or an alkyl or alkoxy group having 1-4 carbon atoms and k represents 1 or 2, at least one compound represented by the following general formula (II):
wherein R₄ represents a hydrogen atom, an alkyl group having 1-4 carbon atoms or a phenyl group, R₅ to R₇ independently of one another each represent a hydrogen atom or an alkyl or alkoxy group having 1-4 carbon atoms and n represents 1 or 2, and an aldehyde compound. This composition is excellent in the balance between performances such as sensitivity, heat resistance and profile, and is free from scum.
一种由碱溶性树脂和醌噻嗪化合物组成的正型抗蚀剂组合物,其中含有树脂(A)的碱溶性树脂可通过与至少一种由下式通式(I)代表的苯酚化合物发生缩合反应而获得:
其中 R₁至 R₃各自独立地代表氢原子或具有 1-4 个碳原子的烷基或 烷氧基,k 代表 1 或 2:
其中 R₄ 代表氢原子、具有 1-4 个碳原子的烷基或苯基,R₅ 至 R₇ 各自独立地代表氢原子或具有 1-4 个碳原子的烷基或烷氧基,n 代表 1 或 2,以及醛化合物。这种组合物在灵敏度、耐热性和外形等性能之间具有极佳的平衡性,而且不会产生浮渣。