Metal–intermetallic Ni/Ni3Al multilayered thin films were synthesized by the magnetron sputtering technique. The synthesized films possessed high hardness that could be compared with intermetallic Ni3Al films. The constituent layers of Ni and Ni3Al were fully adherent to one another at the multilayered boundaries. The fracture surface of the multilayered films on bending showed the characteristics of local ductile fracture. This novel type of multilayered thin films is expected to be used as hard coatings and miniaturized parts of apparatus in micro-electromechanical systems.
利用磁控溅射技术合成了金属间镍/镍3铝多层薄膜。合成的薄膜具有很高的硬度,可与金属间镍3铝薄膜相媲美。镍和镍3铝的组成层在多层边界处完全相互粘附。多层薄膜在弯曲时的断裂面显示出局部韧性断裂的特征。这种新型多层薄膜有望用作微型机电系统中的硬涂层和仪器的微型部件。