allows facile macrocyclization of peptides in the N‐to‐C direction. Combined with the previously developed β‐C(sp3)−H arylation method for peptide macrocyclization in the C‐to‐N direction, a pair of palladium‐catalyzed reactions were obtained that are directionally orthogonal, and the first example of one‐pot synthesis of bicyclic peptides via Pd‐catalyzed β‐C(sp3)−H and δ‐C(sp2)−H activation is demonstrated
Composition for film formation and material for insulating film formation
申请人:JSR CORPORATION
公开号:US20020172652A1
公开(公告)日:2002-11-21
A composition for film formation capable of forming a coating film excellent in low dielectric constant characteristics, cracking resistance, modulus of elasticity, and adhesion to substrates and useful as an interlayer insulating film material in semiconductor devices, etc. The composition for film formation contains (A) at least one member selected from an aromatic polyarylene and an aromatic poly (arylene ether), (B) a polyvinylsiloxane, and (C) an organic solvent.
LAMINATE AND METHOD FOR FORMATION THEREOF, INSULATING FILM, SEMICONDUCTOR DEVICE, AND COMPOSITION FOR FORMING FILM
申请人:JSR Corporation
公开号:EP1679184A1
公开(公告)日:2006-07-12
A laminate having a low relative dielectric constant and exhibiting excellent adhesion, a method of forming the laminate, an insulating film, a semiconductor device, and a film-forming composition are provided.
A laminate according to the invention includes: a first silica-based film; a second silica-based film; and an organic film, wherein the second silica-based film includes a monovalent organic group containing a carbon-carbon double bond or a carbon-carbon triple bond.
A method of forming a laminate according to the invention includes: forming a first coating for a first silica-based film on a substrate; forming a second coating for a second silica-based film on the first coating, the second coating including a monovalent organic group containing a carbon-carbon double bond or a carbon-carbon triple bond; forming a third coating for an organic film on the second coating; and curing a multilayer film including the first to third coatings.
Photocurable composition, pattern forming method, and method for manufacturing device
申请人:FUJIFILM Corporation
公开号:US10739678B2
公开(公告)日:2020-08-11
Provided are a photocurable composition capable of suppressing both deformation (change in line width roughness (ΔLWR)) of a pattern after etching and breakage of a pattern after etching, a pattern forming method, and a method for manufacturing a device. Disclosed is a photocurable composition including a monofunctional (meth)acrylate represented by the following General Formula (I) and a photopolymerization initiator, where R1 represents a hydrogen atom or a methyl group; R2 represents an alkyl group which may be substituted with a fluorine atom, R3 represents a hydrogen atom, a linear alkyl group which may be substituted with a fluorine atom, or a branched alkyl group which may be substituted with a fluorine atom, R4 to R8 each independently represent a hydrogen atom, a halogen atom, a linear alkyl group having 1 to 4 carbon atoms, or a branched alkyl group having 3 or 4 carbon atoms, the total number of carbon atoms included in R2 and R3 is 1 to 6, and R2 and R3, or R2 and R4 may be bonded to each other and form a ring.
Polymer, process for production, composition for film formation containing the same, method of film formation, and insulating film
申请人:JSR CORPORATION
公开号:US20020161173A1
公开(公告)日:2002-10-31
a composition for film formation which can be cured in a short time period and give a film having a low dielectric constant and excellent in heat resistance, adhesion and cracking resistance, a polymer for use in the composition and a process for producing the polymer. The composition prepared by dissolving the polymer having specific repeating units in a solvent has excellent film-forming properties. The polymer has repeating units represented by the following general formula (1):
1
wherein Z and Y are as defined hereinabove.
一种可在短时间内固化并能形成具有低介电常数和优异耐热性、粘附性和抗裂性的薄膜的成膜组合物、一种用于该组合物的聚合物以及一种生产该聚合物的工艺。将具有特定重复单元的聚合物溶解在溶剂中制备的组合物具有优异的成膜性能。该聚合物具有由以下通式(1)表示的重复单元:
1
其中 Z 和 Y 如上文所定义。