Cyclic fluorine compounds, polymerizable fluoromonomers, fluoropolymers, and resist materials containing the fluoropolymers and method for pattern formation
申请人:Sumida Shinichi
公开号:US20060270864A1
公开(公告)日:2006-11-30
The present invention provides a fluorine-containing cyclic compound represented by general formula (1):
wherein R
1
represents a halogen atom, and R
2
and R
3
each represents hydrogen or a hydrocarbon group. The above-mentioned hydrocarbon group is a straight-chain, branched or cyclic hydrocarbon group having 1 to 25 carbon atoms or an aromatic hydrocarbon group, and may contain a halogen atom, an oxygen atom, a nitrogen atom or a sulfur atom. Further, a fluorine-containing polymerizable monomer derived from the above-mentioned fluorine-containing cyclic compound, a fluorine-containing polymer compound obtained by polymerization or copolymerization using the above-mentioned compound or monomer, further a resist material and a pattern forming process using the above-mentioned polymer compound are also disclosed. According to the invention, there is provided the polymer compound suitable for a resist material having high transparency in a wide wavelength region from an ultraviolet region to a near-infrared light region, high adhesion to a substrate, film forming properties, high etching resistance and a high glass transition point at once, particularly for a photoresist material in a vacuum ultraviolet wavelength region. Further, the pattern forming process using the polymer compound is suitable for the formation of a high-resolution pattern form.
本发明提供了一种含氟环状化合物,其通式表示为(1):其中R1表示卤素原子,R2和R3分别表示氢或碳氢基团。上述碳氢基团是直链、支链或环状碳氢基团,具有1至25个碳原子或芳香碳氢基团,并且可以含有卤素原子、氧原子、氮原子或硫原子。此外,本发明还揭示了由上述含氟环状化合物衍生的含氟可聚合单体、使用上述化合物或单体进行聚合或共聚合得到的含氟聚合物化合物,以及使用上述聚合物化合物的光刻胶材料和形成图案的工艺。根据本发明,提供了适用于具有从紫外区域到近红外光区域的宽波长范围内高透明度、高附着力、成膜性好、高蚀刻抗性和高玻璃化转变温度的光刻胶材料的聚合物化合物,特别是适用于真空紫外波长区域的光刻胶材料。此外,使用聚合物化合物的图案形成工艺适用于形成高分辨率图案。