Electron beam resist underlayer film-forming composition containing lactone-structure-containing polymer
申请人:NISSAN CHEMICAL INDUSTRIES, LTD.
公开号:US10289002B2
公开(公告)日:2019-05-14
An electron beam resist underlayer film-forming composition includes a polymer containing a unit structure having a lactone ring and a unit structure having a hydroxy group. The polymer may be a polymer obtained by copolymerizing a monomer mixture containing a lactone (meth)acrylate, a hydroxyalkyl (meth)acrylate, and phenyl (meth)acrylate or benzyl (meth)acrylate. A method for producing a semiconductor device including: applying the electron beam resist underlayer film-forming composition onto a substrate and heating the applied composition to form an electron beam resist underlayer film; coating the electron beam resist underlayer film with an electron beam resist; irradiating the substrate coated with the electron beam resist underlayer film and the electron beam resist with an electron beam; developing the substrate; and transferring an image onto the substrate by dry etching to form an integrated circuit element.
一种电子束抗蚀剂底层成膜组合物包括一种聚合物,该聚合物含有一个具有内酯环的单元结构和一个具有羟基的单元结构。该聚合物可以是通过共聚含有内酯(甲基)丙烯酸酯、羟基烷基(甲基)丙烯酸酯和苯基(甲基)丙烯酸酯或苄基(甲基)丙烯酸酯的单体混合物而得到的聚合物。一种生产半导体器件的方法,包括:将电子束抗蚀剂底层成膜组合物涂在基片上并加热所涂组合物以形成电子束抗蚀剂底层膜;用电子束抗蚀剂涂覆电子束抗蚀剂底层膜;用电子束照射涂有电子束抗蚀剂底层膜和电子束抗蚀剂的基片;显影基片;以及通过干蚀刻将图像转移到基片上以形成集成电路元件。