METHOD FOR IMPROVING THE HEAT STABILITY OF FILMS OF POLY-P-XYLYLENE
申请人:Daisankasei Co.,Ltd.
公开号:EP1700876B1
公开(公告)日:2008-08-13
Method for improving heat stability of polyparaxylylene and derivative film thereof and polyparaxylylene derivative
申请人:Maruyama Hiroshi
公开号:US20070105997A1
公开(公告)日:2007-05-10
A method for improving the heat stability of polyparaxylylene and a derivative film thereof to improve the heat resistance of the polyparaxylylene and the derivative film thereof without deteriorating deposition characteristics or profitability, and a polyparaxylylene derivative whose heat resistance is improved are provided. When the polyparaxylylene or the derivative film thereof represented by a below-described general formula 1 is formed by a chemical vapor deposition method, an amino-(2.2)-paracyclophane compound represented by a below-described general formula 3 is mixed in a (2.2)-paracyclophane compound represented by a below-described general formula 2 to form a film.
(In the formula 1, X
1
and X
2
designate hydrogen, lower alkyl or halogen. X
1
and X
2
may be the same or different. n represents a degree of polymerization.)
(In the formula 2, X
1
and X
2
have the same meanings as those of the formula 1.)
(In the formula 3, X
3
designates hydrogen or a lower alkyl group. Y
1
and Y
2
designate hydrogen or an amino group and both Y
1
and Y
2
are not hydrogens at the same time.)