5-Methyl-2,3-dihydro-1-benzothiophene-2-carboxylic acid | 1894202-69-7

• 分子结构分类: 有机化合物 - 有机硫化合物 - 硫醚类
• 英文名称: 5-Methyl-2,3-dihydro-1-benzothiophene-2-carboxylic acid
• CAS: 1894202-69-7
• 化学式: C₁₀H₁₀O₂S
• 分子量: 194.25
• InChiKey: ATODMKHRPLWSGL-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  2.5
• 重原子数：
  13
• 可旋转键数：
  1
• 环数：
  2.0
• sp3杂化的碳原子比例：
  0.3
• 拓扑面积：
  62.6
• 氢给体数：
  1
• 氢受体数：
  3

文献信息

• RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, COMPOUND, AND ACID DIFFUSION-CONTROLLING AGENT
  申请人：TOKYO OHKA KOGYO CO., LTD.

  公开号：US20220011665A1

  公开（公告）日：2022-01-13

  A resist composition that contains a base material component exhibiting changed solubility in a developing solution under action of acid and a compound (D0) represented by General Formula (d0), in which R 01 , R 02 , R 03 , and R 04 each independently represents a hydrogen atom, a hydroxy group, a halogen atom, or an alkyl group; alternatively, R 01 and R 02 , R 02 and R 03 , or R 03 and R 04 are bonded to each other to form an aromatic ring; R 05 represents a hydrogen atom or an alkyl group; Y represents a group that forms an alicyclic group together with a carbon atom *C; provided that at least one of the carbon atoms that form the alicyclic group is substituted with an ether bond, a thioether bond, a carbonyl group, a sulfinyl group, or a sulfonyl group; m represents an integer of 1 or more, and M m+ represents an m-valent organic cation

  一种抗蚀组合物，包含一种基础材料组分，在酸的作用下在显影溶液中表现出改变的溶解度，以及一种化合物（D0），其通式为（d0），其中R01、R02、R03和R04各自独立地代表氢原子、羟基、卤素原子或烷基；或者，R01和R02、R02和R03、或R03和R04彼此连接形成芳香环；R05代表氢原子或烷基；Y代表与碳原子*C一起形成脂环基的基团；前提是至少有一个形成脂环基的碳原子被醚键、硫醚键、羰基、亚磺酰基或磺酰基取代；m表示1或更多的整数，Mm+表示m价有机阳离子。