[EN] LIGAND-MODIFIED FILTER AND METHODS FOR REDUCING METALS FROM LIQUID COMPOSITIONS<br/>[FR] FILTRE MODIFIÉ PAR LIGAND ET PROCÉDÉS DE RÉDUCTION DE MÉTAUX À PARTIR DE COMPOSITIONS LIQUIDES
申请人:ENTEGRIS INC
公开号:WO2020163181A1
公开(公告)日:2020-08-13
Described are filter materials including a polyol ligand, such as n-methylglucamine, and/or a polyphosphonic acid ligand, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter basic and acidic fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.