Indicator used in electronic device manufacturing apparatus and method for designing and/or managing the apparatus
申请人:SAKURA COLOR PRODUCTS CORPORATION
公开号:US10181414B2
公开(公告)日:2019-01-15
Provided is an indicator that can easily detect whether treatment with at least one member of plasma, ozone, ultraviolet rays, and radical-containing gas is uniformly performed on an entire substrate in an electronic device manufacturing apparatus; also provided is a method for designing and/or managing an electronic device manufacturing apparatus using the indicator. The indicator is used in an electronic device manufacturing apparatus, wherein (1) the indicator detects at least one member selected from the group consisting of plasma, ozone, ultraviolet rays, and radical-containing gas, (2) the indicator has a shape that is the same as that of a substrate used in the electronic device manufacturing apparatus, (3) the indicator contains a color-changing layer, and (4) the color-changing layer is formed by an ink composition whose color changes or disappears by reaction with at least one member selected from the group consisting of plasma, ozone, ultraviolet rays, and radical-containing gas.
本发明提供了一种指示器,可轻松检测电子设备制造装置中是否对整个基板均匀执行了等离子体、臭氧、紫外线和含自由基气体中至少一种成员的处理;还提供了一种使用该指示器设计和/或管理电子设备制造装置的方法。该指示器用于电子设备制造装置中,其中 (1) 指示器检测从等离子体、臭氧、紫外线和含自由基气体组成的组中选出的至少一个成员;(2) 指示器的形状与电子设备制造装置中使用的基板的形状相同、(3) 指示器包含变色层,以及 (4) 变色层由墨水成分形成,通过与选自等离子体、臭氧、紫外线和含自由基气体组成的组中的至少一种成员反应,墨水成分的颜色会改变或消失。