A photosensitive composition ensuring good performance in terms of pattern profile and line edge roughness in normal exposure (dry exposure), immersion exposure and double exposure, a pattern forming method using the photosensitive composition, and a compound for use in the photosensitive composition are provided.
A photosensitive composition comprising: (A) a resin containing a repeating unit corresponding to a compound represented by the following formula (I); the resin being capable of producing an acid group upon irradiation with an actinic ray or radiation:
Z-A-X-B-R (I)
wherein Z represents a group capable of becoming an acid group resulting from leaving of a cation upon irradiation with an actinic ray or radiation which is a salt of an organic acid group selected from the group consisting of an imide acid group and a methide acid group; A represents an alkylene group; X represents a single bond or a heteroatom-containing divalent linking group; B represents a single bond, an oxygen atom or -N(Rx)-; Rx represents a hydrogen atom or a monovalent organic group; R represents a monovalent organic group substituted by Y; when B represents -N(Rx)-, R and Rx may combine with each other to form a ring; and Y represents a polymerizable group.
本发明提供了一种在正常曝光(干法曝光)、浸入式曝光和双重曝光中都能确保图案轮廓和线边粗糙度性能良好的感光组合物,一种使用该感光组合物的图案形成方法,以及一种用于该感光组合物的化合物。
一种光敏组合物包括:(A) 一种
树脂,其中含有与下式 (I) 所代表的化合物相对应的重复单元;该
树脂在接受放 射线或辐射照射时能够产生酸基:
Z-A-X-B-R (I)
其中 Z 代表一个基团,该基团能在放 射线或辐射照射时因阳离子的离开而成为酸基,该阳离子是选自
亚胺酸基和甲酰胺酸基的有机酸基的盐;A 代表一个亚烷基;X 代表单键或含杂原子的二价连接基团; B 代表单键、氧原子或-N(Rx)-; Rx 代表氢原子或一价有机基团; R 代表被 Y 取代的一价有机基团;当 B 代表-N(Rx)-时,R 和 Rx 可相互结合形成环;以及 Y 代表可聚合基团。