申请人:Daicel Chemical Industries, Ltd.
公开号:EP2308905A1
公开(公告)日:2011-04-13
A copolymer includes at least monomeric units (A) corresponding to a carbonyl- or acid-anhydride-group-containing polymerizable unsaturated compound (a) ; monomeric units (B) corresponding to at least one polymerizable unsaturated compound (b) selected from compounds represented by following Formulae (1) and (2) (wherein Ra represents a hydrogen atom or, e.g., an alkyl group having 1 to 4 carbon atoms; and Rb represents a single bond or, e.g., an alkylene group having 1 to 18 carbon atoms); and monomeric units (C) corresponding to at least one polymerizable unsaturated compound (c) selected from compounds represented by following Formulae (3) and (4) (wherein Rc represents a hydrogen atom or, e.g., an alkyl group having 1 to 4 carbon atoms; and Rd represents a single bond or, e.g., an alkylene group having 1 to 18 carbon atoms). The copolymer, when used as a radiation-sensitive resin, can give a high-performance cured film excellent in hardness, solvent resistance, and thermal stability.
共聚物至少包括与含羰基或酸酐基团的可聚合不饱和化合物(a)相对应的单体单元(A);与选自下式(1)和(2)所代表化合物的至少一种可聚合不饱和化合物(b)相对应的单体单元(B)(其中Ra代表氢原子或例如具有1至4个碳原子的烷基;Rb代表单键或例如具有1至18个碳原子的亚烷基);以及与选自下式(3)和(4)所代表化合物的至少一种可聚合不饱和化合物(c)相对应的单体单元(C)、其中 Rc 代表氢原子或例如具有 1 至 4 个碳原子的烷基;Rd 代表单键或例如具有 1 至 18 个碳原子的亚烷基);以及与至少一种可聚合的不饱和化合物 (c) 相对应的单体单元 (C),该化合物选自下式 (3) 和 (4) 所代表的化合物(其中 Rc 代表氢原子或例如具有 1 至 4 个碳原子的烷基;Rd 代表单键或例如具有 1 至 18 个碳原子的亚烷基)。这种共聚物用作辐射敏感树脂时,可产生硬度、耐溶剂性和热稳定性都很好的高性能固化薄膜。