The photosensitive resin composition comprises (a) a ternary copolymer of an ethylenically unsaturated amide, carboxyl-containing monomer and third monomer, (b) an esterified resin by the reaction of an unsaturated carboxylic acid and a novolac-type epoxy resin, (c) a photopolymerizable monomer, (d) a photopolymerization initiator and (e) a powder such as a finely divided silica filler. The resist layer formed from the composition is capable of being developed with an alkaline aqueous solution and has excellent heat resistance in addition to other desirable properties when the patterned resist layer by the pattern-wise exposure to ultraviolet light and development is subjected to a heat treatment to effect thermal curing.
光敏
树脂组合物包括:(a)
乙烯基不饱和酰胺、含羧基单体和第三单体的三元共聚物;(b) 由不饱和
羧酸和
酚醛型环氧
树脂反应生成的酯化
树脂;(c) 可进行光聚合的单体;(d) 光聚合
引发剂;(e) 粉末,如细小的
二氧化硅填料。 由该组合物形成的抗蚀层可以用碱性
水溶液显影,并且当通过紫外线照射和显影的图案抗蚀层经过热处理以实现热固化时,除具有其他理想特性外,还具有优异的耐热性。