2,3-Dihydro-2-oxo-5-benzofuranyl 2-propenoate | 440680-53-5

• 分子结构分类: 有机化合物 - 苯类化合物 - 苯酚酯
• 英文名称: 2,3-Dihydro-2-oxo-5-benzofuranyl 2-propenoate
• 英文别名: (2-oxo-3H-1-benzofuran-5-yl) prop-2-enoate
• CAS: 440680-53-5
• 化学式: C₁₁H₈O₄
• 分子量: 204.18
• InChiKey: XEHYKVZBCSPTAS-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  1.7
• 重原子数：
  15
• 可旋转键数：
  3
• 环数：
  2.0
• sp3杂化的碳原子比例：
  0.09
• 拓扑面积：
  52.6
• 氢给体数：
  0
• 氢受体数：
  4

文献信息

• FLUOROCARBOXYLIC ACID-CONTAINING MONOMER, FLUOROCARBOXYLIC ACID-CONTAINING POLYMER, RESIST COMPOSITION AND PATTERNING PROCESS
  申请人：Shin-Etsu Chemical Co., Ltd.

  公开号：US20210341839A1

  公开（公告）日：2021-11-04

  A fluorocarboxylic acid-containing polymer comprising recurring units having formula (A1), but not acid labile group-containing recurring units is provided. A resist composition comprising the same offers a high sensitivity and is unsusceptible to nano-bridging or pattern collapse independent of whether it is of positive or negative tone.

  提供一种含有氟羧酸的聚合物，其中包含具有式（A1）的重复单元，但不含有酸不稳定的重复单元。包含该聚合物的抗蚀剂组合物具有高灵敏度，并且无论是正向还是负向调色板，都不易出现纳米桥接或图案坍塌。
• IODIZED AROMATIC CARBOXYLIC ACID TYPE PENDANT-CONTAINING POLYMER, RESIST COMPOSITION AND PATTERNING PROCESS
  申请人：Shin-Etsu Chemical Co., Ltd.

  公开号：US20210333712A1

  公开（公告）日：2021-10-28

  An iodized aromatic carboxylic acid type pendant-containing polymer is provided. A resist composition comprising the same offers a high sensitivity and is unsusceptible to nano-bridging, pattern collapse or residue formation, independent of whether it is of positive or negative tone.