[EN] BICYCLIC GUANIDINES, METAL COMPLEXES THEREOF AND THEIR USE IN VAPOR DEPOSITION<br/>[FR] GUANIDINES BICYCLIQUES, LEURS COMPLEXES MÉTALLIQUES, ET LEUR UTILISATION DANS LES PROCÉDÉS DE DÉPÔT EN PHASE VAPEUR
申请人:HARVARD COLLEGE
公开号:WO2009105668A1
公开(公告)日:2009-08-27
Bicyclic guanidine compounds are described. Metal bicyclic guanidinate and its use in vapor deposition processes to deposit a metal-containing thin film are also described. Methods of making alkaline earth metal N,N'dialkylacetamidinates or bicyclic guanidinates including dissolution of alkaline earth metal into liquid ammonia followed by addition of a solution of an amidine or guanidine ligand in the free base form are provided.
BICYCLIC GUANIDINES, METAL COMPLEXES THEREOF AND THEIR USE IN VAPOR DEPOSITION
申请人:Gordon Roy G.
公开号:US20110151615A1
公开(公告)日:2011-06-23
Bicyclic guanidine compounds are described. Metal bicyclic guanidinate and its use in vapor deposition processes to deposit a metal-containing thin film are also described. Methods of making alkaline earth metal N,N′dialkylacetamidinates or bicyclic guanidinates including dissolution of alkaline earth metal into liquid ammonia followed by addition of a solution of an amidine or guanidine ligand in the free base from are provided.