CHEMICAL AMPLIFICATION RESIST COMPOSITION, AND MOLD PREPARATION METHOD AND RESIST FILM USING THE SAME
申请人:Fujimori Toru
公开号:US20120006788A1
公开(公告)日:2012-01-12
A chemical amplification resist composition that is used for preparation of a mold, and a mold preparation method and a resist film each using the composition are provided.
提供一种用于制备模具的化学放大型光阻组合物,以及使用该组合物的模具制备方法和光阻膜。