Quinone diazo compounds having bonded to the diazo ring or directly bonded to a ring of the compound, certain non-metallic atoms that improve the photosensitivity thereof are provided. These quinone diazo compounds are useful as photoactive compounds in photoresist compositions, and particularly positive photoresist composition employed in x-ray or electron beam radiation. Also provided is a method for preparing compounds of the present invention.
提供了重
氮环上键合或直接键合有某些非
金属原子的醌重
氮化合物,可提高其光敏性。这些醌重
氮化合物可用作光刻胶组合物中的光活性化合物,特别是在 X 射线或电子束辐射中使用的正性光刻胶组合物。还提供了一种制备本发明化合物的方法。