COMPOUND, ACTIVE LIGHT SENSITIVE OR RADIATION SENSITIVE RESIN COMPOSITION, RESIST FILM USING SAME, RESIST-COATED MASK BLANK, PHOTOMASK, PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE
申请人:FUJIFILM Corporation
公开号:US20160116840A1
公开(公告)日:2016-04-28
Provided is an active light sensitive or radiation sensitive resin composition which contains a compound (A) represented by General Formula (I) or (II):
in the formulae, each of Y
1
and Y
2
represents a monovalent organic group; each of M
1
+
and M
2
+
represents an organic onium ion; each of X
1
and X
2
represents a group that is represented by —S—, —NH—, or —NR
1
—; R
1
represents a monovalent organic group; each of n1 and n2 represents an integer of 1 or more; and R
1
and Y
1
or Y
2
may bond with each other to form a ring.