Vinylphenylpropionic acid derivatives; processes for producing the derivatives; polymers of the same; and radiosensitive resin compositions containing the polymers. The above polymers exhibit low radiation absorption and are useful as the resin component of radiosensitive resin compositions particularly suitable for chemically amplified resists. For example, t-butyl 4-vinylphenylpropionate is produced by (1) reacting t-butyl bromoacetate with tri(n-butyl)phosphine to obtain a quaternary phosphonium salt, (2) reacting this salt with a base to obtain a phosphorus ylide, (3) reacting this ylide with 2,4,6-tris(3',5'-di-t-butyl-4'-hydroxybenzyl)methyl-styrene to obtain a quaternary phosphonium salt, and (4) hydrolyzing this salt.
乙烯基苯丙酸衍
生物;生产该衍
生物的工艺;该衍
生物的聚合物;以及含有该聚合物的辐射敏感
树脂组合物。上述聚合物的辐射吸收率低,可用作辐射敏感
树脂组合物的
树脂成分,尤其适用于
化学放大抗蚀剂。例如,4-
乙烯基苯基
丙酸叔丁酯是通过以下方法制得的:(1) 将
溴乙酸叔丁酯与三(正丁基)膦反应,得到季
鏻盐、(2) 将这种盐与碱反应,得到一种
磷酰亚胺; (3) 将这种
酰亚胺与 2,4,6-三(3',5'-二-叔丁基-4'-羟基苄基)
甲基苯乙烯反应,得到一种季
鏻盐; (4) 将这种盐
水解。