A pattern forming material used for forming an organic film on a film to be processed of a substrate having the film to be processed, the organic film being patterned and then impregnated with a metallic compound to form a composite film which is used as a mask pattern when processing the film to be processed, the pattern forming material contains a polymer including a monomer unit represented by the following general formula (3),
where, R
1
is H or CH
3
, R
2
is a C
2-14
hydrocarbon group, Q is a C
1-20
hydrocarbon group, or an organic group containing an oxygen atom, a nitrogen atom, or a sulfur atom between carbon-carbon atoms or at a bond terminal of a C
1-20
hydrocarbon group, and X and Y are independently a hydrogen atom or a C
1-4
hydrocarbon group, at least one of them being the C
1-4
hydrocarbon group.
一种用于在待处理底片的薄膜上形成有机膜的图案形成材料,该有机膜经过图案化处理,然后浸渍
金属化合物以形成复合膜,该复合膜在处理待处理薄膜时用作掩膜图案。该图案形成材料包含聚合物,其中包括由下式(3)表示的单体单元,其中R1为H或
CH3,R2为C2-14烃基,Q为C1-20烃基或含有氧原子、氮原子或
硫原子的有机基,在碳-碳原子之间或C1-20烃基的键端之间,X和Y分别为氢原子或C1-4烃基,其中至少一个为C1-4烃基。