[EN] LITHOGRAPHIC TOOL IN SITU CLEAN FORMULATIONS<br/>[FR] FORMULATIONS DE NETTOYAGE IN SITU D'APPAREIL LITHOGRAPHIQUE
申请人:ADVANCED TECH MATERIALS
公开号:WO2010088194A2
公开(公告)日:2010-08-05
Compositions and methods of using said composition for removing polymeric materials from surfaces, preferably cleaning contaminant buildup from a lithography apparatus without total disassembly of said apparatus.
Beiträge zur Darstellung und bakteriziden Wirkung von Halbestern niederer Dicarbonsäuren mit Phenolen