CATALYZED POLYMERIZATION OF CYCLIC ESTERS AND CYCLIC CARBONATES
申请人:Dubois Philippe Ghilain
公开号:US20150126703A1
公开(公告)日:2015-05-07
A process for the preparation of polyesters or polycarbonates including (i) the provision of cyclic esters or cyclic carbonates, (ii) polymerizing by ring-opening in the presence of a betaine based metal-free catalyst showing formula
−
X—R
1
—Y
+
(R
2
)
3
wherein X is S, O or Se,
Y is N or P,
R
1
is linear or cyclic alkyl or aryl, and
R
2
is linear or cyclic alkyl.
and under polymerizing conditions in the presence of an alcohol or amine based initiator.
PATTERN FORMING METHOD, ACTIVE LIGHT SENSITIVE OR RADIATION SENSITIVE RESIN COMPOSITION, RESIST FILM, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, AND ELECTRONIC DEVICE
申请人:FUJIFILM Corporation
公开号:US20160041465A1
公开(公告)日:2016-02-11
The pattern forming method includes (1) forming a film using an active light sensitive or radiation sensitive resin composition, (2) exposing the film to active light or radiation, and (3) developing the exposed film using a developer including an organic solvent, in which the active light sensitive or radiation sensitive resin composition contains a resin (A) having a group which generates a polar group by being decomposed due to the action of an acid, the resin (A) has a phenolic hydroxyl group and/or a phenolic hydroxyl group protected with a group leaving due to the action of an acid, and the developer including the organic solvent contains an additive which forms at least one interaction of an ionic bond, a hydrogen bond, a chemical bond, and a dipole interaction, with the polar group.
RESIST PATTERN-FORMING METHOD
申请人:JSR CORPORATION
公开号:US20170075224A1
公开(公告)日:2017-03-16
A resist pattern-forming method comprises applying a chemically amplified resist material on a substrate to form a resist film on the substrate. The resist film is patternwise exposed to a radioactive ray having a wavelength of no greater than 250 nm. The resist film patternwise exposed is floodwise exposed to a radioactive ray having a wavelength of greater than 250 nm. The resist film floodwise exposed is baked and developed with a developer solution comprising an organic solvent. The chemically amplified resist material comprises a component that is capable of generating a radiation-sensitive sensitizer and an acid upon an exposure. The component comprises: a radiation-sensitive sensitizer generating agent, and at least one of a radiation-sensitive acid-and-sensitizer generating agent and a radiation-sensitive acid generating agent. The radiation-sensitive sensitizer generating agent comprises a compound represented by formula (B).