申请人:THE REGENTS OF THE UNIVERSITY OF CALIFORNIA
公开号:US10340144B2
公开(公告)日:2019-07-02
Disclosed herein is a method for doping a substrate, comprising disposing a coating of a composition comprising a copolymer, a dopant precursor and a solvent on a substrate; where the copolymer is capable of phase segregating and embedding the dopant precursor while in solution; and annealing the substrate at a temperature of 750 to 1300° C. for 0.1 second to 24 hours to diffuse the dopant into the substrate. Disclosed herein too is a semiconductor substrate comprising embedded dopant domains of diameter 3 to 30 nanometers; where the domains comprise Group 13 or Group 15 atoms, wherein the embedded spherical domains are located within 30 nanometers of the substrate surface.
本文公开了一种掺杂衬底的方法,包括在衬底上涂布一层由共聚物、掺杂剂前体和溶剂组成的组合物;其中共聚物在溶液中能够相分离并嵌入掺杂剂前体;以及在750至1300℃的温度下将衬底退火0.1秒至24小时,使掺杂剂扩散到衬底中。本文还公开了一种半导体衬底,该衬底包括直径为 3 至 30 纳米的嵌入式掺杂畴;其中畴包括 13 族或 15 族原子,嵌入式球形畴位于衬底表面 30 纳米范围内。