Cu- and Rh-catalyzed coupling reactions of 2-azabicyclo[2.2.1]hept-5-en-3-ones (1) with arylboronicacids were successful carried out under microwave irradiation conditions and yielded N-aryl and C-aryl derivatives of 1, respectively.
RESIN, RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20160077433A1
公开(公告)日:2016-03-17
A resist composition includes (A1) a resin which includes a structural unit represented by formula (a4), a structural unit represented by formula (II), the resin has no acid-labile group, (A2) a resin having an acid-labile group, and an acid generator:
wherein R
3
represents a hydrogen atom or a methyl group, and R
4
represents a C
1
to C
24
saturated hydrocarbon group having a fluorine atom where a methylene group may be replaced by an oxygen atom or a carbonyl group; R
7
represents a hydrogen atom, a halogen atom or a C
1
to C
6
alkyl group that may have a halogen atom; ring X
1
represents a C
2
to C
36
heterocyclic group containing a nitrogen atom and a carbonyl group, a hydrogen atom contained in the heterocyclic group may be replaced by a halogen atom, a hydroxy group, a C
1
to C
24
hydrocarbon, a C
1
to C
12
alkoxyl group, a C
2
to C
4
acyl group, or a C
2
to C
4
acyloxy group, and a methylene group contained in the heterocyclic group may be replaced by an oxygen atom or a carbonyl group.