Integrated optical waveguide interferometer for evanescent sensing of chemical and/or physical quantities, comprising a substrate carrying a waveguide layer structure provided with
- a first waveguide core layer sandwiched between two first cladding layers formed by a first lower and a first upper (6) cladding layer, of a lower refractive index than the first waveguide core layer,
- a second waveguide core layer sandwiched between two second claddings layers formed by a second lower and a second upper (6) cladding layer, of a lower refractive index than the second waveguide core layer,
- a splitter (2) and a combiner (5) for optically coupling said first and second waveguide core layers at first and second junctions, respectively, characterized by
- a modulation section of a polymer cladding material (9) included in one of the first upper cladding layers (6) and/or included in one of the second upper cladding layers (6), the polymer cladding material covering an identifiable area of said first waveguide core layer and/or said second waveguide core layer between the first and second junctions, said polymer cladding material having an index of refraction between 1.46 and 2.5 that varies with temperature, thereby changing the phase of radiation propagating through said first and second waveguide core layers,
- means (10) for raising and lowering the temperature of said polymer cladding material (9).
用于
化学和/或物理量的蒸发传感的集成光波导干涉仪,包括一个带有波导层结构的衬底,该波导层结构有
- 夹在由第一下层和第一上层(6)包层形成的两个第一包层之间的第一波导芯层,其折射率比第一波导芯层低、
- 夹在由第二下层和第二上层(6)包层形成的两个第二包层之间的第二波导芯层,其折射率比第二波导芯层低、
- 分流器(2)和合路器(5),分别用于在第一和第二交界处对所述第一和第二波导芯层进行光学耦合,其特征在于
- 聚合物包层材料(9)的调制部分,包含在第一上包层(6)和/或第二上包层(6)中,聚合物包层材料覆盖第一和第二结点之间所述第一波导芯层和/或所述第二波导芯层的可识别区域,所述聚合物包层材料的折射率在 1.46 和 2.5 之间,随温度变化,从而改变通过所述第一和第二波导芯层传播的辐射的相位、
- 用于提高和降低所述聚合物包层材料 (9) 温度的装置 (10)。