The present invention relates to novel precursors in the form of metal complexes with 2-substituted 1,3-diketones and to a process for the preparation thereof. The invention furthermore relates to the use thereof for the production of thin metal-oxide layers. The latter are constituents in a very wide variety of electronic components and devices having various functions.
本发明涉及一种新型前体,其形式为与2-取代的1,3-二酮的
金属配合物,并涉及其制备方法。此外,本发明还涉及将其用于生产薄金属氧化物层的用途。后者是各种具有不同功能的电子元件和设备的组成部分。