A composition for forming a resist underlayer film has excellent storage stability at normal temperature. A composition for forming a resist underlayer film for lithography including a nitrogen-containing compound having 2 to 6 substituents of the following Formula (1) which bond to nitrogen atoms in one molecule, a polymer, a compound that promotes a crosslinking reaction, and an organic solvent. The nitrogen-containing compound having 2 to 6 substituents of Formula (1) in one molecule is for example a glycoluril derivative of the following Formula (1A).
In the formula, each R
1
is a methyl group or an ethyl group, and R
2
and R
3
are independently a hydrogen atom, a C
1-4
alkyl group, or phenyl group.
一种用于形成抗蚀底层膜的组合物具有良好的常温储存稳定性。一种用于光刻的抗蚀底层膜的组合物包括具有以下式(1)中的2至6个取代基的
含氮化合物,一种聚合物,一种促进交联反应的化合物和一种有机溶剂。其中,具有式(1A)的甘
氨酰
脲衍
生物的每个R1是甲基基团或乙基基团,而R2和R3分别是氢原子、C1-4烷基或苯基。