申请人:LG Chem, Ltd.
公开号:EP3683245A1
公开(公告)日:2020-07-22
The present application relates to a method for producing a patterned substrate. The method may be applied to a process of manufacturing devices such as, for example, electronic devices and integrated circuits, or other applications, such as manufacture of integrated optical systems, guidance and detection patterns of magnetic domain memories, flat panel displays, liquid crystal displays (LCDs), thin film magnetic heads or organic light emitting diodes, and the like, and may also be used to build a pattern on a surface used in manufacture of discrete track media, such as integrated circuits, bit-patterned media and/or magnetic storage devices such as hard drives.
本申请涉及一种生产图案基板的方法。该方法可应用于电子设备和集成电路等设备的制造过程,或其他应用,如制造集成光学系统、磁域存储器的引导和检测图案、平板显示器、液晶显示器(LCD)、薄膜磁头或有机发光二极管等,也可用于在制造分立轨道介质(如集成电路、位图案介质和/或硬盘等磁性存储设备)的表面上构建图案。