A benzoxazole resin precursor comprising a first repeating unit which is obtained by the reaction of a bisaminophenol compound and a dicarboxylic acid compound, at least one of which has the diamondoid structure; a benzoxazole resin precursor further comprising a second repeating unit which is obtained by the reaction of a bisaminophenol compound having no diamondoid structure and a dicarboxylic acid compound having no diamondoid structure; a polybenzoxazole resin obtained by the ring-closing reaction with dehydration of the above benzoxazole resin precursor; a resin film constituted with the benzoxazole resin precursor or the polybenzoxazole resin. A polybenzoxazole resin and a resin film having excellent heat resistance and a small permittivity and a semiconductor device using the resin film can be obtained from the benzoxazole resin precursor.
一种
苯并恶唑树脂前体,包括由双
氨基苯酚化合物和二
羧酸化合物反应得到的 第一重复单元,其中至少一个重复单元具有菱形结构;
苯并恶唑树脂前体,进一步包含第二重复单元,该第二重复单元由无菱形结构的双
氨基苯酚化合物和无菱形结构的二
羧酸化合物反应得到; 通过上述
苯并恶唑树脂前体的脱
水闭环反应得到的聚
苯并恶唑树脂; 由
苯并恶唑树脂前体或聚
苯并恶唑树脂构成的
树脂薄膜。利用
苯并恶唑树脂前体可获得具有优异耐热性和较小介电常数的聚
苯并恶唑树脂和
树脂薄膜,以及使用该
树脂薄膜的半导体器件。