There is provided a micro chemical device with a valve function for which the pressure resistance is high and the channel cross-sectional area does not depend on the fluid pressure, and which furthermore enables the suppression of the adsorption of biological matter and yet is easy to produce, as well as a flow regulation method using such a device. This has a valve function, in which a member (B) is bonded to a member (A) with a groove in the surface thereof, via the surface of the member (A) in which the groove is formed, a capillary type channel of width from 1 to 1000 &mgr;m and height from 1 to 1000 &mgr;m is formed by the groove of the member (A) and the member (B) at the bonding surface between the member (A) and the member (B), a cavity section is formed partway along the channel and the width of this cavity section is from 0.5 to 100 fold the width of the capillary type channel and the ratio of maximum height/maximum width for the cavity section is no more than 1, and either one of the member (A) and the member (B) is formed from a soft material with a tensile modulus of elasticity within a range from 0.1 MPa to 700 MPa, at least within the portion which corresponds with the position of the cavity section, wherein by selectively compressing the cavity section from the external surface of the member (A) and/or the member (B), the volume of the cavity section can be reduced in a reversible manner.
本发明提供了一种具有阀门功能的微型
化学装置,其抗压性能高,通道横截面积不依赖于流体压力,而且能够抑制
生物物质的吸附,但易于生产,还提供了使用这种装置的流量调节方法。该装置具有阀门功能,其中一个构件(B)与一个表面带有凹槽的构件(A)相连接,通过构件(A)形成凹槽的表面,形成一个宽度为 1 至 1000 &mgr;米、高度为 1 至 1000 &mgr;m 的毛细管型通道,该通道由构件(A)和构件(B)的凹槽在构件(A)和构件(B)之间的结合面上形成,沿通道的部分位置形成一个空腔部分,该空腔部分的宽度为构件(A)和构件(B)宽度的 0.5至100倍的毛细管型通道宽度,且空腔部分的最大高度/最大宽度之比不大于1,构件(A)和构件(B)中的任一构件由拉伸弹性模量在0.其中,通过从构件(A)和/或构件(B)的外表面选择性地压缩空腔部分,可以以可逆的方式减小空腔部分的体积。