Phosphorylation of the 5'-O-monomethoxytrityl-2'-deoxyribonucleosides by means of aryl phosphoranilidochloridates gives the diastereoisomers of 5'-O-monomethoxytrityl-2'-deoxyribonucleoside 3'-aryl phosphoranilidates. Their separation can be performed by means of chromatographic techniques. They can be further converted to the 2'-deoxyribonucleoside cyclic3'-5' phosphoranilidates, which are intermediates