To provide a photosensitive resin composition capable of forming an etching mask having sufficient resistance to an etchant to be used for etching of a glass substrate, the mask being able to be peeled off by an organic solvent-based stripping liquid, and a method for etching a glass substrate, the method including forming an etching mask using the photosensitive resin composition. For formation of an etching mask at the time of etching a glass substrate, a photosensitive resin composition including a resin component (A) having an acid-dissociable dissolution-inhibiting group and whose solubility in alkali is increased by action of an acid, an acid generator (B) generating an acid by irradiation with radiation, a filler (C), and a plasticizer (D), or a photosensitive resin composition including a resin component (A1) having a phenolic hydroxyl group, a protective agent (A2) to give an acid-dissociable dissolution-inhibiting group by reacting with a phenolic hydroxyl group, the acid generator (B), the filler (C), and the plasticizer (D), is used.
提供一种光敏
树脂组合物,该组合物能够形成对蚀刻液具有足够耐受性的蚀刻掩膜,用于蚀刻
玻璃基板,该掩膜能够被有机溶剂型剥离液剥离;还提供一种蚀刻
玻璃基板的方法,该方法包括使用该光敏
树脂组合物形成蚀刻掩膜。为了在蚀刻
玻璃基板时形成蚀刻掩膜,光敏
树脂组合物包括具有可酸解的溶解抑制基团且其在碱中的溶解度在酸的作用下会增加的
树脂成分 (A)、通过辐射产生酸的酸发生器 (B)、填料 (C) 和光敏
树脂组合物、填充剂 (C) 和
增塑剂 (D),或光敏
树脂组合物,包括具有
酚羟基的
树脂成分 (A1)、通过与
酚羟基、酸发生器 (B)、填充剂 (C) 和
增塑剂 (D) 反应产生可酸解的溶解抑制基的保护剂 (A2)。