Bis(diaryliodonium) perfluorosulfonimide zwitterions as potential photo acid generators
摘要:
Three examples of bis(diaryliodonium) perfluorosulfonimide (BDI-PFSI) zwitterions have been prepared as a potential new class of ionic photo-acid generators for chemically amplified photoresist formulations. (C) 2014 Elsevier B.V. All rights reserved.