A radiation-sensitive resin composition includes a first polymer that includes a repeating unit having an acid-labile group and becomes alkali-soluble upon dissociation of the acid-labile group, and a radiation-sensitive acid-generating agent. The acid-labile group has a structure shown by a general formula (1). R1 represents a methyl group or the like, R2 represents a hydrocarbon group that forms a cyclic structure, R3 represents a fluorine atom or the like, R4 represents a carbon atom, and n1 is an integer from 1 to 7.
一种辐射敏感的
树脂组合物,包括第一
聚合物,该
聚合物包括具有酸敏感基团的
重复单元,并在酸敏感基团解离时变为碱溶性,以及辐射敏感的酸生成剂。酸敏感基团具有通式(1)所示的结构。其中,R1代表
甲基基团或类似物,R2代表形成环状结构的
碳氢基团,R3代表
氟原子或类似物,R4代表
碳原子,n1为1至7的整数。