A positive resist composition for electron beam, X-ray or EUV includes (A) a compound represented by the following formula (I), and (B) a resin capable of decomposing by the action of an acid to increase solubility in an alkali developing solution, which includes a repeating unit represented by the following formula (II) and a repeating unit represented by the following formula (III):
                            一种适用于电子束、X射线或EUV的正性光阻组合物,包括(A)由以下式子(I)表示的化合物和(B)一种
树脂,能够通过酸的作用分解以增加在碱性显影液中的可溶性,该
树脂包括由以下式子(II)和以下式子(III)表示的重复单元: