Patterning compositions are described based on organo tin dodecamers with hydrocarbyl ligands, oxo ligands, hydroxo ligands and carboxylato ligands. Alternative dodecamer embodiments have organo tin ligands in place of hydrocarbyl ligands. The organo tin ligands can be incorporated into the dodecamers from a monomer with the structure (RCC)
3
SnQ, where R is a hydrocarbyl group and Q is a alkyl tin moiety with a carbon bonded to the Sn atom of the monomer and with a Sn bonded as a replacement of a quaternary carbon atom with bonds to 4 carbon atoms. Some or all of the carboxylato and hydroxyl ligands can be replaced with fluoride ions. Good EUV patterning results are obtained with the dodecamer based patterning compositions.
基于具有烃基
配体、氧
配体、羟基
配体和
羧酸盐
配体的
有机锡十二聚体的图案化组合物被描述。替代的十二聚体实体具有代替烃基
配体的
有机锡配体。
有机锡配体可以从具有结构(RCC)3SnQ的单体中并入十二聚体中,其中R是烃基团,Q是与单体的Sn原子连接的烷基
锡基团,具有将Sn键合为代替四价碳原子并与4个碳原子键合的位置。一些或所有的
羧酸盐和羟基
配体可以被
氟离子取代。基于十二聚体的图案化组合物获得良好的EUV图案化结果。