申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US10719015B2
公开(公告)日:2020-07-21
A laminate comprising a thermoplastic film and a positive resist film is provided, the positive resist film comprising (A) a novolak resin-naphthoquinone diazide (NQD) base resin composition, (B) a polyester, and (C) 3-30 wt % of an organic solvent. The resist film may be transferred to a stepped support without forming voids.
提供了一种由热塑性薄膜和正极抗蚀膜组成的层压板,正极抗蚀膜包括 (A) 酚醛树脂-重氮化萘醌(NQD)基树脂组合物、(B) 聚酯和 (C) 3-30 wt % 的有机溶剂。抗蚀剂薄膜可转移到阶梯状支撑物上而不会形成空隙。