The present invention provides a salt of the formula (I):
wherein ring X represents monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms, and one or more hydrogen atom in the monocyclic or polycyclic hydrocarbon group is optionally substituted with alkyl group having 1 to 10 carbon atom, alkoxy group having 1 to 10 carbon atom, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 10 carbon atoms or cyano group; Q
1
and Q
2
each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; and A
+
represents organic counter ion.
The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).
本发明提供了一种公式(I)的盐:
其中,环X代表具有3至30个碳原子的单环或多元
环烃基团,并且单环或多元
环烃基团中的一个或多个氢原子可被选地取代为具有1至10个碳原子的烷基、具有1至10个碳原子的烷氧基、具有1至4个碳原子的
全氟烷基、具有1至10个碳原子的羟基烷基或腈基;Q1和Q2各自独立地代表
氟原子或具有1至6个碳原子的
全氟烷基;以及A+代表有机反离子。
本发明还提供了一种包含公式(I)的盐的
化学放大抗蚀剂组合物。