PATTERN FORMING METHOD, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION AND RESIST FILM
申请人:Enomoto Yuichiro
公开号:US20120282548A1
公开(公告)日:2012-11-08
Provided is a pattern forming method comprising (i) a step of forming a film from an actinic ray-sensitive or radiation-sensitive resin composition, (ii) a step of exposing the film, and (iii) a step of developing the exposed film by using an organic solvent-containing developer, wherein the actinic ray-sensitive or radiation-sensitive resin composition comprises (A) a resin capable of decreasing the solubility for an organic solvent-containing developer by the action of an acid, (B) a compound capable of generating an acid upon irradiation with an actinic ray or radiation, (D) a solvent, and (G) a compound having at least either one of a fluorine atom and a silicon atom and having basicity or being capable of increasing the basicity by the action of an acid.
提供的是一种形成图案的方法,包括(i)使用光致或辐射敏感树脂组成物形成薄膜的步骤,(ii)曝光薄膜的步骤,以及(iii)使用有机溶剂含有的显影剂显影曝光后的薄膜的步骤,其中光致或辐射敏感树脂组成物包括(A)一种能够通过酸的作用降低有机溶剂含有的显影剂的溶解度的树脂,(B)一种能够在光致或辐射照射下生成酸的化合物,(D)一种溶剂,以及(G)一种具有氟原子和硅原子中的至少一种,并具有碱性或能够通过酸的作用增加碱性的化合物。