A method of forming a chemical mechanical polishing pad composite polishing layer is provided, including: providing a first polishing layer component of a first continuous non-fugitive polymeric phase having a plurality of periodic recesses; discharging a combination toward the first polishing layer component at a velocity of 10 to 300 msec, filling the plurality of periodic recesses with the combination; allowing the combination to solidify in the plurality of periodic recesses forming a second non-fugitive polymeric phase giving a composite structure; and, deriving the chemical mechanical polishing pad composite polishing layer from the composite structure, wherein the chemical mechanical polishing pad composite polishing layer has a polishing surface on the polishing side of the first polishing layer component; and wherein the polishing surface is adapted for polishing a substrate.
提供了一种形成
化学机械抛光垫复合抛光层的方法,包括提供具有多个周期性凹槽的第一连续非逃逸聚合物相的第一抛光层组件;以 10 至 300 毫秒的速度向第一抛光层组件排放组合物,用组合物填充多个周期性凹槽;使组合物在多个周期性凹槽中凝固,形成具有复合结构的第二非逃逸聚合物相;以及,从复合结构中衍生出
化学机械抛光垫复合抛光层,其中
化学机械抛光垫复合抛光层在第一抛光层组件的抛光侧具有抛光面;且抛光面适于抛光基底。