Sulfonate salts and derivatives, photoacid generators, resist compositions, and patterning process
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US07531290B2
公开(公告)日:2009-05-12
Sulfonate salts have the formula:
R1SO3—CH(Rf)—CF2SO3−M+
wherein R1 is alkyl or aryl, Rf is H or trifluoromethyl, and M+ is a Li, Na, K, ammonium or tetramethylammonium ion. Onium salts, oximesulfonates and sulfonyloxyimides and other compounds derived from these sulfonate salts are effective photoacid generators in chemically amplified resist compositions.
磺酸盐的化学式为:R1SO3—CH(Rf)—CF2SO3−M+,其中R1代表烷基或芳香族基,Rf代表氢或三氟甲基,M+代表锂、钠、钾、铵或四甲基铵离子。从这些磺酸盐衍生出来的离子盐、氧化磺酰肟和磺酰氧基亚胺等化合物是化学放大型光刻胶组成中有效的光酸发生剂。