THERMAL BASE GENERATOR, THERMOSETTING RESIN COMPOSITION, CURED FILM, CURED FILM MANUFACTURING METHOD, AND SEMICONDUCTOR DEVICE
申请人:FUJIFILM Corporation
公开号:EP3162868A1
公开(公告)日:2017-05-03
Provided are a thermal base generator which is capable of performing cyclization of a thermosetting resin at a low temperature and with which a thermosetting resin composition having excellent stability can be prepared, a thermosetting resin composition, a cured film, a cured film manufacturing method, and a semiconductor device.
The thermal base generator includes at least one selected from an acidic compound which generates a base in a case of being heated to 40°C or higher, and an ammonium salt containing an anion having a pKa1 of 0 to 4 and an ammonium cation. The acidic compound is preferably an ammonium salt and/or a compound represented by the following General Formula (1), in which A1 represents a p-valent organic group, R1 represents a monovalent organic group, L1 represents an (m+1)-valent organic group, m represents an integer of 1 or more, and p represents an integer of 1 or more.
本发明提供了一种热碱发生器,它能够在低温下对热固性树脂进行环化,并用它制备出稳定性极佳的热固性树脂组合物、热固性树脂组合物、固化膜、固化膜制造方法和半导体设备。
热碱发生器包括至少一种酸性化合物和铵盐,前者在加热到 40°C 或更高温度时产生碱,后者含有 pKa1 为 0 至 4 的阴离子和铵阳离子。酸性化合物最好是铵盐和/或下式(1)所代表的化合物,其中 A1 代表 p 价有机基团,R1 代表一价有机基团,L1 代表 (m+1)- 价有机基团,m 代表 1 或 1 以上的整数,p 代表 1 或 1 以上的整数。