申请人:Zeon Corporation
公开号:EP3438746A1
公开(公告)日:2019-02-06
A radiation-sensitive resin composition comprising a cyclic olefin polymer (A) having a protonic polar group, a bifunctional epoxy compound (B) represented by the following general formula (1), and a radiation-sensitive compound (C):
wherein, in the above general formula (1), R1 is a linear chain or branched alkylene group having 1 to 15 carbon atoms, and "k" is an integer of 1 to 20, is provided.
一种辐射敏感树脂组合物,由具有质子极性基团的环烯烃聚合物 (A)、由以下通式 (1) 表示的双官能环氧化合物 (B) 和辐射敏感化合物 (C) 组成:
其中,在上述通式(1)中,R1 是具有 1 至 15 个碳原子的直链或支链烯基,"k "是 1 至 20 的整数。