Provided are a laminate which is capable of forming an excellent organic semiconductor pattern, a kit for manufacturing an organic semiconductor, which is used to manufacture such a laminate, and a resist composition for manufacturing an organic semiconductor, which is used for the kit for manufacturing an organic semiconductor.
The laminate includes an organic semiconductor film, a protective film on the organic semiconductor film, and a resist film on the protective film, in which the resist film is formed of a photosensitive resin composition that contains a photoacid generator (A) which generates an organic acid of which a pKa of the generated acid is −1 or less and a resin (B) which reacts with an acid generated by the photoacid generator so that the rate of dissolution in a developer containing an organic solvent is decreased.
提供的是一种层压材料,能够形成出优异的有机半导体图案,用于制造这种层压材料的有机半导体制造套件,以及用于该有机半导体制造套件的制造有机半导体的抗蚀剂组合物。该层压材料包括有机半导体膜、覆盖在有机半导体膜上的保护膜以及覆盖在保护膜上的抗蚀膜,其中抗蚀膜由光敏
树脂组成,该光敏
树脂组合物包含一种光酸发生剂(A),其生成的有机酸的pKa小于等于-1,以及一种
树脂(B),该
树脂与光酸发生剂生成的酸反应,使得在含有有机溶剂的显影剂中的溶解速率降低。