Actinic-ray- or radiation-sensitive resin composition, compound and method of forming pattern using the composition
申请人:Yamaguchi Shuhei
公开号:US08557499B2
公开(公告)日:2013-10-15
According to one embodiment, an actinic-ray- or radiation-sensitive resin composition includes a compound (A) that when exposed to actinic rays or radiation, generates any of the acids of general formula (II) below and a resin (B) whose rate of dissolution into an alkali developer is increased by the action of an acid.
(The characters used in general formula (I) have the meanings mentioned in the description.)
Actinic-Ray- or Radiation-Sensitive Resin Composition, Compound and Method of Forming Pattern Using the Composition
申请人:Yamaguchi Shuhei
公开号:US20120237874A1
公开(公告)日:2012-09-20
According to one embodiment, an actinic-ray- or radiation-sensitive resin composition includes any of the compounds (A) of general formula (I) below that when exposed to actinic rays or radiation, generates an acid and a resin (B) whose rate of dissolution into an alkali developer is increased by the action of an acid. (The characters used in general formula (I) have the meanings mentioned in the description.)
LAMINATE, KIT FOR MANUFACTURING ORGANIC SEMICONDUCTOR, AND
RESIST COMPOSITION FOR MANUFACTURING ORGANIC SEMICONDUCTOR
申请人:FUJIFILM Corporation
公开号:US20160240816A1
公开(公告)日:2016-08-18
Provided are a laminate which is capable of forming an excellent organic semiconductor pattern, a kit for manufacturing an organic semiconductor, which is used to manufacture such a laminate, and a resist composition for manufacturing an organic semiconductor, which is used for the kit for manufacturing an organic semiconductor.
The laminate includes an organic semiconductor film, a protective film on the organic semiconductor film, and a resist film on the protective film, in which the resist film is formed of a photosensitive resin composition that contains a photoacid generator (A) which generates an organic acid of which a pKa of the generated acid is −1 or less and a resin (B) which reacts with an acid generated by the photoacid generator so that the rate of dissolution in a developer containing an organic solvent is decreased.
ACTINIC-RAY-OR RADIATION-SENSITIVE RESIN COMPOSITION, COMPOUND AND METHOD OF FORMING PATTERN USING THE COMPOSITION
申请人:Yamaguchi Shuhei
公开号:US20110008731A1
公开(公告)日:2011-01-13
According to one embodiment, an actinic-ray- or radiation-sensitive resin composition includes a compound (A) that when exposed to actinic rays or radiation, generates any of the acids of general formula (II) below and a resin (B) whose rate of dissolution into an alkali developer is increased by the action of an acid.
(The characters used in general formula (I) have the meanings mentioned in the description.)