Novel onium salts, photoacid generators, resist compositions, and patterning process
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:US20020076643A1
公开(公告)日:2002-06-20
Onium salts of arylsulfonyloxynaphthalenesulfonate anions with iodonium or sulfonium cations are novel. A chemically amplified resist composition comprising the onium salt as a photoacid generator is suited for microfabrication, especially by deep UV lithography because of many advantages including improved resolution, improved focal latitude, minimized line width variation or shape degradation even on long-term PED, minimized debris after coating, development and peeling, and improved pattern profile after development.
Ethanolysis of nitrogen mustards: A novel strategy for nitrogen mustard identification in environmental matrices by liquid chromatography–electrospray ionization–tandem mass spectrometry
Nitrogenmustards (NMs) are blistering chemical warfare agents. The ability to detect NMs in environmental samples is very important for obtaining forensic evidence. The most common analytical techniques for NM detection are gas chromatography–mass spectrometry, which detects NMs in their intact form but is disadvantaged by high limits of detection (LODs), and liquid chromatography–electrospray ionization–tandem
Photosensitive compositions containing carbonylic halides as activators
申请人:Dynachem Corporation
公开号:EP0005379A2
公开(公告)日:1979-11-14
Compositions containing a polymerizable, curable or crosslinkable component. a photoinitiator, a colorformer capable of changing color upon contact with a suitable activator and a latent activator containing an organic halide will become insoluble and change color under the influence of actinic radiation. The organic halide is a carbonylic compound such as an aliphatic or cycloaliphatic ketone or an ester or amide of a dicarboxylic acid. The compositions are useful to make resists used in the electronics industry to manufacture printed circuits.
Phototropic photosensitive compositions containing a fluoran colorformer
申请人:Dynachem Corporation
公开号:EP0005380A2
公开(公告)日:1979-11-14
Compositions containing a polymerizable, curable or crosslinkable component, a photoinitiator, a fluoran colorformer and a latent activator that releases or promotes the release of a Lewis acid, will become insoluble and change color under the influence of actinic radiation. These compositions are particularly useful to make dry film photoresists, which are widely used in the electronics industry to manufacture printed circuits.
Photoactivated polymerization of vinyl monomer in the presence of polysilanes and amines
申请人:MINNESOTA MINING AND MANUFACTURING COMPANY
公开号:EP0154519A2
公开(公告)日:1985-09-11
This invention relates to photoactivatable polysilanes and processes involving the use thereof.
It is frequently desirable to employ photopolymerization techniques to conduct the polymerization of vinyl (ethylenically unsaturated) monomers and prepolymers.
The invention comprises subjecting a mixture of
(1) a vinyl monomer or prepolymer, and
(2) a polysilane having a chain of catenated silicon atoms (which may appear in an open chain or in a ring configuration) and a molecular weight of from about 5 x 102 to 5 x 106 to electromagnetic energy having wavelengths in the absorption range of from about 250 to 400 nanometers (nm) until the degree of polymerization of the monomer or prepolymer has increased. In another aspect, an organic amine can be included in the aforementioned mixture, in which case the amine acts as an activator.
The process of the invention is particularly useful where it is desired to provide protective films or coatings on substrates since it has a number of advantages (such as speed, economy, efficiency and the like) over conventional polymerization techniques. The compositions of the invention can be conveniently applied as liquids to substrates then polymerized by means of electromagnetic energy, alone or together with elevated temperature, to form hard coatings.
本发明涉及可光激活的聚硅烷及其使用工艺。
乙烯基(乙烯基不饱和)单体和预聚物的聚合通常需要采用光聚合技术。
本发明包括将乙烯基(乙烯基不饱和)单体和预聚物的混合物
(1) 乙烯基单体或预聚物,和
(2) 聚硅烷,该聚硅烷具有一条由硅原子组成的链,硅原子可呈开放链或环状结构,分子量约为 5 x 102 至 5 x 106,将其置于波长在约 250 至 400 纳米(nm)吸收范围内的电磁能中,直至单体或预聚物的聚合度增加。另一方面,上述混合物中可加入有机胺,在这种情况下,胺可作为活化剂。
与传统聚合技术相比,本发明的工艺具有许多优点(如速度快、经济、高效等),因此在需要在基材上提供保护膜或涂层时特别有用。本发明的组合物可以作为液体方便地涂在基底上,然后通过电磁能单独或与升高的温度一起聚合,形成坚硬的涂层。