申请人:INTERNATIONAL BUSINESS MACHINES CORPORATION
公开号:US20030008230A1
公开(公告)日:2003-01-09
Thiophene-containing photo acid generators having either of the following general formulas:
1
wherein at least one of R
1
, R
2
or R
3
is thiophene or thiophene that is substituted with alkyl, alkoxy or cycloalkyl, and the remaining R
1
, R
2
or R
3
, not containing a thiophene moiety, are independently selected from the group consisting of alkyl, cycloalkyl and aryl, or at least one of R
1
, R
2
or R
3
are joined together to form a cyclic moiety having from about 4 to about 8 ring carbon atoms; and Y is a counter ion, are disclosed as well as the use thereof as a component of a chemically amplified resist composition. In addition to the thiophene-containing photo acid generator, the inventive composition includes a chemically amplified base polymer, a solvent, an optional photosensitizer, an optional base, an optional dissolution modifying agent and an optional surfactant.
具有以下任一通式的含噻吩的光酸发生器:
1
其中 R
1
, R
2
或 R
3
是噻吩或被烷基、烷氧基或环烷基取代的噻吩,其余 R
1
, R
2
或 R
3
不含噻吩分子,且独立地选自烷基、环烷基和芳基组成的组,或至少一个 R
1
, R
2
或 R
3
本发明公开了含噻吩的光酸发生器,以及其作为化学放大抗蚀剂组合物成分的用途。除了含噻吩的光酸发生器外,本发明组合物还包括化学放大基聚合物、溶剂、任选光敏剂、任选碱、任选溶解改性剂和任选表面活性剂。