PATTERN FORMING METHOD, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, MANUFACTURING METHOD OF ELECTRONIC DEVICE, ELECTRONIC DEVICE AND COMPOUND
申请人:FUJIFILM CORPORATION
公开号:US20160070167A1
公开(公告)日:2016-03-10
There is provided a pattern forming method comprising (i) a step of forming a film containing an actinic ray-sensitive or radiation-sensitive resin composition containing (A) a compound represented by the specific formula, (B) a compound different from the compound (A) and capable of generating an acid upon irradiation with an actinic ray or radiation, and (P) a resin that does not react with the acid generated from the compound (A) and is capable of decreasing the solubility for an organic solvent-containing developer by the action of the acid generated from the compound (B), (ii) a step of exposing the film, and (iii) a step of developing the exposed film by using an organic solvent-containing developer to form a negative pattern; the actinic ray-sensitive or radiation-sensitive resin composition above; a resist film using the composition.
Solvolyis reactions of perfluoro-5-aza-4-nonene, C3F7CFNC4F9
作者:A.R Siedle、Robert J Webb、R.A Newmark、Myles Brostrom、David A Weil、Kristin Erickson、Fred.E Behr、Victor G Young
DOI:10.1016/s0022-1139(03)00084-8
日期:2003.8
Hydrolysis of the imine perfluoro-5-aza-4-nonene, C3F7-CF=N-C4F9, in ether was studied by several spectroscopic techniques including O-17 NMR. The initial product is C3F7-CO-NH-C4F9 which is converted to (C3F7CO)(2)NH and then to C3F7CONH2 and C3F7CO2H. Solvolysis in liquid ammonia afforded the amidine C3F7-C(=NH)NH2. Reaction with hydrazine produced 3,5-bis(heptafluoropropyl)-1,2,4-triazole whose crystal structure is reported. (C) 2003 Elsevier Science B.V. All rights reserved.
US9523912B2
申请人:——
公开号:US9523912B2
公开(公告)日:2016-12-20
Nu, nu-bis(1, 1-dihydroperfluoroalkyl) acylamides and polymers thereof