Photosensitive composition, pattern-forming method using the photosensitve composition and compound in the photosensitive composition
申请人:Wada Kenji
公开号:US08426101B2
公开(公告)日:2013-04-23
A photosensitive composition containing a compound having a specific structure as described in the specification, a pattern-forming method using the photosensitive composition and the compound having a specific structure used in the photosensitive composition.
一种光敏组合物,其中包含具有规范中所述特定结构的化合物,使用该光敏组合物和使用在光敏组合物中的具有特定结构的化合物的图案形成方法。