申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US11353790B2
公开(公告)日:2022-06-07
Disclosed is a resin including a structural unit represented by formula (a1-5) and a structural unit represented by formula (I), and a resist composition:
wherein Ra8 represents an alkyl group which may have a halogen atom, a hydrogen atom or a halogen atom; Za1 represents a single bond or *—(CH2)h3—CO-L54-; h3 represents an integer of 1 to 4; L51, L52, L53 and L54 each independently represent —O— or —S—; s1 represents an integer of 1 to 3; s1′ represents an integer of 0 to 3; R1 represents a hydrogen atom or a methyl group; A1 represents a single bond or *—CO—O—; R2 represents a halogen atom, a hydroxy group, a haloalkyl group or an alkyl group; mi represents an integer of 1 to 3; and ni represents an integer of 0 to 4, in which mi+ni≤5.
本发明公开了一种树脂(包括由式(a1-5)表示的结构单元和由式(I)表示的结构单元)和一种抗蚀剂组合物:
其中 Ra8 代表烷基,该烷基可具有卤原子、氢原子或卤原子; Za1 代表单键或 *-(CH2)h3-CO-L54-; h3 代表 1 至 4 的整数; L51、L52、L53 和 L54 各自独立地代表 -O- 或 -S-; s1 代表 1 至 3 的整数;s1′ 代表 0 至 3 的整数; R1 代表氢原子或甲基; A1 代表单键或 *-CO-O-; R2 代表卤原子、羟基、卤代烷基或烷基; mi 代表 1 至 3 的整数; ni 代表 0 至 4 的整数,其中 mi+ni≤5.