Resist composition, novel phenol compound and quinone diazide sulfonic acid ester of novel phenol compound
申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:EP0341608A2
公开(公告)日:1989-11-15
A quinone diazide sulfonic acid ester of a phenol compound of the general formula (I):
wherein Y₁, Y₂, Y₃ and Y₄ are the same or different and each a hydrogen atom, an alkyl group, a halogen atom or a hydroxyl group, provided that at least one of Y₁, Y₂, Y₃ and Y₄ is a hydroxyl group; Z₁, Z₂, Z₃, Z₄, Z₅ and Z₆ are the same or different and each a hydrogen atom, an alkyl, an aryl group, a halogen atom or a hydroxyl group, provided that at least one of Z₁, Z₂, Z₃, Z₄, Z₅ and Z₆ is a hydroxyl group; X is
in which R₁ and R₂ are the same or different and each a hydrogen atom, an alkyl group, an alkenyl group, a cycloalkyl group, an alkoxy group or an aryl group, provided that when at least one of R₁ and R₂ is a hydrogen atom, an alkyl or aryl group is present at the ortho position to a hydroxyl group which is present at the ortho position to X provides a positive resist composition which has a high γ-value.
一种通式为(I)的
苯酚化合物的醌重氮
磺酸酯:
其中 Y₁、Y₂、Y₃ 和 Y₄ 相同或不同,且各自为氢原子、烷基、卤素原子或羟基,条件是 Y₁、Y₂、Y₃ 和 Y₄ 中至少有一个是羟基;Z₁、Z₂、Z₃、Z₄、Z₅ 和 Z₆ 相同或不同,且各自为氢原子、烷基、芳基、卤素原子或羟基,条件是 Z₁、Z₂、Z₃、Z₄、Z₅ 和 Z₆ 中至少有一个是羟基;X 是
其中,R₁ 和 R₂ 可以相同或不同,并且各自为氢原子、烷基、烯基、环烷基、烷氧基或芳基,条件是当 R₁ 和 R₂ 中至少有一个是氢原子、烷基或芳基时,在与羟基的正交位置上存在羟基,而羟基在与 X 的正交位置上存在时,可提供具有高 γ 值的正抗蚀剂组合物。