Negative-type photosensitive resin composition, cured film, element and display apparatus that include cured film, production method for the same
申请人:TORAY INDUSTRIES, INC.
公开号:US10802401B2
公开(公告)日:2020-10-13
To provide an alkaline developable negative-type photosensitive resin composition from which a cured film that has a high-resolution and low-taper pattern shape and that are excellent in heat resistance and light blocking property can be obtained. A negative-type photosensitive resin composition is characterized by containing an (A1) first resin, a (A2) second resin, a (C) photopolymerization initiator, and a (D) coloring agent, wherein the (A1) first resin is an (A1-1) polyimide and/or an (A1-2) polybenzo-oxazole, and wherein the (A2) second resin is one or more species selected from a (A2-1) polyimide precursor, a (A2-2) polybenzo-oxazole precursor, a (A2-3) polysiloxane, a (A2-4) cardo based resin, and an (A2-5) acrylic resin, and wherein a content ratio of the (A1) first resin in a total of 100 mass % of the (A1) first resin and the (A2) second resin is within the range of 25 to 90 mass %.
提供一种可碱性显影的底片型感光树脂组合物,通过该组合物可以获得具有高分辨率和低锥形图案形状的固化胶片,并且该胶片具有优异的耐热性和遮光性。阴图型感光树脂组合物的特点是含有 (A1) 第一树脂、(A2) 第二树脂、(C) 光聚合引发剂和 (D) 着色剂,其中 (A1) 第一树脂是 (A1-1) 聚酰亚胺和/或 (A1-2) 聚苯并噁唑,(A2) 第二树脂是选自 (A2-1) 聚酰亚胺前体、(A2-2) 聚苯并噁唑、(A2-3) 聚苯并噁唑、(A2-4) 聚苯并噁唑、(A2-5) 聚苯并噁唑和(A2-6) 聚苯并噁唑的一种或多种、(A2-2)聚苯并恶唑前体、(A2-3)聚硅氧烷、(A2-4)卡多基树脂和(A2-5)丙烯酸树脂中的一种或多种,其中(A1)第一树脂在(A1)第一树脂和(A2)第二树脂总质量的 100%中的含量比在 25 至 90 质量%的范围内。